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"Field emission gun scanning electron microscope development and application" project passed acceptance
[ Instrument Network Instrument R & D ] On December 6, the National Comprehensive Scientific Acceptance Meeting of the National Major Scientific Instrument and Equipment Development Project “Field Emission Gun Scanning Electron Microscope Development and Application†undertaken by Beijing Zhongke Keyi Co., Ltd. was held in Beijing Foreign Experts Building The meeting was attended by members of the expert group of the Ministry of Science and Technology, project lead units, cooperation and application units.
At the meeting, the acceptance expert group heard the completion report made by Zhang Yongming, the person in charge of the Chinese science and technology instrument project, watched the project video, and listened to the report of the off-site test. Participating expert group members highly evaluated the completion of the project and unanimously recommended acceptance.
Zhongke Keyi has been committed to the research and development of electronic microscope products and technological upgrade for many years. The first DX-3 scanning electron microscope developed by Zhongke Keyi in China in 1975 has a resolution of 10nm; in 1985, it cooperated with the American AMARY company. The KYKY-1000B scanning electron microscope developed in cooperation has a resolution of 6nm; until today, the resolution of the KYKY-EM8100 field emission gun scanning electron microscope has reached 1nm.
The field emission gun scanning electron microscope participating in the acceptance inspection is an indispensable tool for nanotechnology research, providing important support for cutting-edge technology research, improving the development of high-end scientific instruments, promoting the development of precision manufacturing, and meeting semiconductor technology, life sciences, and environmental protection. And other urgent needs.
This project has broken through many key technologies such as high-resolution electron optical imaging system design, field emission gun engineering design and manufacturing, and electron beam acceleration lens barrel design and manufacturing, and successfully developed a Schottky field emission gun scanning electron microscope with independent intellectual property rights. The resolution index reaches and exceeds 3nm @ 1kV and 1nm @ 30kV respectively, reaching the international advanced level, which greatly promotes the development of China's electronic optical instrument industry, enables China's scanning electron microscope to achieve step-by-step flyover, and effectively solves the current "neck" The problem has broken the monopoly situation of foreign products, promoted the development of the country and the national industry, and greatly promoted and improved the level of localization and autonomy of high-end equipment in China's cutting-edge scientific research, major projects and strategic emerging industries.